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This paper introduces the recent progress in methodologies and their related applications based on the soft x-ray interf......
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基于严格的矢量耦合波方法,结合纳米级光栅实际制作工艺,定量分析了在13.4nm软X射线(TE偏振)正入射条件下,光栅材料、厚度、占空比、梯形......